发明名称 METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
摘要 Provided is a method for manufacturing a semiconductor device, which includes: preparing a semiconductor wafer; and peeling off an adhesive layer from the semiconductor wafer. The prepared semiconductor wafer includes at least one semiconductor chip having a bump electrode group formed by arraying bump electrodes in a matrix, and the adhesive layer formed on one surface having the bump electrodes. The bump electrode group is formed by arraying the bump electrodes so that the number of bump electrodes in a second direction can be smaller than that in a first direction. To peel off the adhesive layer from the semiconductor wafer, the adhesive layer is peeled off from the semiconductor wafer along the first direction from one end side of the semiconductor wafer.
申请公布号 US2013183799(A1) 申请公布日期 2013.07.18
申请号 US201213467464 申请日期 2012.05.09
申请人 SASAKI JUN;KOYANAGI TADASHI;ELPIDA MEMORY, INC. 发明人 SASAKI JUN;KOYANAGI TADASHI
分类号 H01L23/00 主分类号 H01L23/00
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