METHOD AND SYSTEM OF PROVIDING DOPANT CONCENTRATION CONTROL IN DIFFERENT LAYERS OF A SEMICONDUCTOR DEVICE
摘要
A method and system for controlling the amount of a second material incorporated into a first material by controlling the amount of a third material which can interact with the second material.
申请公布号
US2013183794(A1)
申请公布日期
2013.07.18
申请号
US201313739183
申请日期
2013.01.11
申请人
FIRST SOLAR, INC.;FIRST SOLAR, INC.
发明人
XIONG GANG;POWELL RICK C.;PENG XILIN;BARDEN JOHN;ALLENIC ARNOLD;LIAO FENG;RING KENNETH M.
