Drive and power supply device for rotatable cylindrical anode used for vacuum processing system, has rotary vacuum seal, power transmission device, torque transmission device and coolant supply device which are arranged in housing

摘要

The drive and power supply device has housing (3) which is provided with housing flange (31) having a connecting surface. A pad is provided for mounting the housing at the outer side of vacuum chamber. The housing is rotatably mounted with a hollow shaft extended through the housing flange. An electrode terminal is provided for receiving the cylindrical electrode portion (10). The rotary vacuum seal, power transmission device, torque transmission device, rotary water seal and coolant supply device are arranged sequentially in the housing with respect to housing flange. Independent claims are included for the following: (1) rotatable cylindrical anode; and (2) vacuum processing system.