ELECTROSTATIC CHUCK ASSEMBLY WITH DIELECTRIC MATERIAL AND/OR CAVITY HAVING VARYING THICKNESS, PROFILE AND/OR SHAPE, METHOD OF USE AND APPARATUS INCORPORATING SAME
摘要
申请公布号
KR20130082174(A)
申请公布日期
2013.07.18
申请号
KR20137016394
申请日期
2006.09.15
申请人
LAM RESEARCH CORPORATION
发明人
DHINDSA RAJINDER;LENZ ERIC;LI LUMIN;KOZAKEVICH FELIX
