摘要 |
An interference filter includes first and second reflecting films opposed to each other across a gap, the first and second reflecting films include an Ag-Sm-Cu alloy film or an Ag-Bi-Nd alloy film, the Ag-Sm-Cu alloy film includes 0.1 atomic %@Sm@0.5 atomic %, and 0.1 atomic %@Cu and @0.5 atomic %, and Sm+Cu@1.0 atomic %, the Ag-Bi-Nd alloy film includes 0.1 atomic %@Bi@3.0 atomic %, and 0.1 atomic %@Nd@5.0 atomic %, and the thickness of the Ag-Sm-Cu alloy film or the Ag-Bi-Nd alloy film is >=10 nm and @40 nm.
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