| 摘要 |
PURPOSE: An electrostatic chuck with a division embossing structure is provided to reduce defects due to thermal imbalance by supplying a cooling gas to a divided embossing part. CONSTITUTION: An electrostatic chuck(100) with a division embossing structure includes a base(110) and an embossing part(120). The embossing part is formed on the front of the base and supports a substrate in contact with the substrate. A plurality of embossing parts are regularly formed on the base. One embossing part is composed of a plurality of pieces which are separately divided. The base includes a gas hole(130), a gas path, an electrode, and an electrode terminal. |
