THERMAL DIFFUSION APPARATUS

摘要

PURPOSE: A heat diffusion device is provided to improve a property of a dopant layer by maintaining the gas evenly in a diffusion chamber. CONSTITUTION: A diffusion chamber contains a discharge pipe (29) in a side. The diffusion chamber contains a sub treatment member (10) inside. An injection pipe is equipped with one or more of holes (32). Gas needed for a thermal diffusion process is supplied The hole and a diffusion chamber.