SEMICONDUCTOR DEVICE AND METHOD OF FABRICATING THE SAME

摘要

PURPOSE: A semiconductor device and a manufacturing method thereof are provided to secure an even step coverage property by using a self-assembled monolayer. CONSTITUTION: A barrier layer (120) comprises a Mercapto Propyl Tri Methoxy Silane (MPTMS). The barrier layer comprises a monomolecular film. The MPTMS is formed on a substructure (110). A conductive layer (130) is formed on the barrier layer. The conductive layer comprises a copper.