| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for manufacturing a silicon substrate having a textured structure that, in comparison with previous methods, reduces manufacturing steps and allows a regular textured structure to be easily formed on a silicon substrate surface.SOLUTION: A manufacturing method of the present invention includes: (A) a step of forming a pattern on a silicon substrate using a composition containing a resin; (B) a step of irradiating etching gas on the surface of the silicon substrate other than the pattern portion; and (C) a step of processing the silicon substrate irradiated with the etching gas using an alkaline etching liquid to form a recessed structure under the pattern portion. Furthermore, the present invention provides a composition containing a resin used in the manufacturing method, in particular, a composition containing a photo-setting resin. |
