MEMS ACCELERATION SENSOR

摘要

PROBLEM TO BE SOLVED: To provide a MEMS acceleration sensor enabling reliable detection in spite of a small required area on a substrate.SOLUTION: A MEMS acceleration sensor includes: a sensor mass body 2 arranged in parallel with a substrate 7 in a X-Y plane and rotatably attached about a rotation axis 6 onto the substrate 7 and including a plurality of holes; and a sensor element 8 for detecting rotation about the rotation axis 6 of the sensor mass body 2 of which the weight is different on both sides on the basis of the rotation axis 6. In order to change the weight of the sensor mass body 2 on one side on the basis of the rotation axis 6 to the weight thereof on the other side on the basis of the rotation axis 6, a material of the sensor mass body 2 is partially removed in some areas of the holes to reduce the weight and/or is added especially to extension parts of the holes in a Z direction to increase the weight.