发明名称 IMAGING APPARATUS USING TALBOT INTERFERENCE AND ADJUSTING METHOD FOR IMAGING APPARATUS
摘要 An imaging apparatus includes a diffraction grating which diffracts electromagnetic waves from an electromagnetic wave source, a shield grating which shields a part of the electromagnetic waves diffracted by the diffraction grating, a detector which detects an intensity distribution of the electromagnetic waves through the shield grating, and an adjusting unit which adjusts the attitude of at least one of the diffraction grating and the shield grating on the basis of the detection result by the detector, wherein the adjusting unit divides the intensity distribution detected by the detector into a plurality of regions and adjusts the attitude of at least one of the diffraction grating and the shield grating on the basis of the intensity distributions of the plurality of regions.
申请公布号 US2013181130(A1) 申请公布日期 2013.07.18
申请号 US201113824974 申请日期 2011.10.11
申请人 ITOH HIDENOSUKE;NAGAI KENTARO;CANON KABUSHIKI KAISHA 发明人 ITOH HIDENOSUKE;NAGAI KENTARO
分类号 G01B9/02;G01N23/04 主分类号 G01B9/02
代理机构 代理人
主权项
地址