发明名称 SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF
摘要 A semiconductor device capable of increasing ON current while reducing channel resistance and allowing transistors to operate independently and stably, having a fin formed to protrude from the bottom of a gate electrode trench, a gate insulating film covering the surfaces of the gate electrode trench and the fin, a gate electrode embedded in a lower part of the gate electrode trench and formed to stride over the fin via the gate insulating film, a first impurity diffusion region arranged on a first side face, and a second impurity diffusion region arranged on a second side face.
申请公布号 US2013181271(A1) 申请公布日期 2013.07.18
申请号 US201313736381 申请日期 2013.01.08
申请人 ELPIDA MEMORY, INC.;ELPIDA MEMORY, INC. 发明人 OYU KIYONORI;OKONOGI KENSUKE;MORI KAZUTO
分类号 H01L27/108;H01L29/78 主分类号 H01L27/108
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