发明名称 |
PROFILING SOLID STATE SAMPLES |
摘要 |
Methods may operate to position a sample within a processing chamber and operate on a surface of the sample. Further activities may include creating a layer of reactive material in proximity with the surface, and exciting a portion of the layer of reactive material in proximity with the surface to form chemical radicals. Additional activities may include removing a portion of the material in proximity to the excited portion of the surface to a predetermined level, and continuing the creating, exciting and removing actions until at least one of a plurality of stop criteria occurs.
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申请公布号 |
US2013180950(A1) |
申请公布日期 |
2013.07.18 |
申请号 |
US201313784468 |
申请日期 |
2013.03.04 |
申请人 |
MICRON TECHNOLOGY, INC.;MICRON TECHNOLOGY, INC. |
发明人 |
RUEGER NEAL R.;WILLIAMSON MARK J.;SANDHU GURTEJ S.;ARRINGTON JUSTIN R. |
分类号 |
H01L31/0232 |
主分类号 |
H01L31/0232 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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