发明名称 |
COMPOSITE SUBSTRATE, MANUFACTURING METHOD THEREOF AND LIGHT EMITTING DEVICE HAVING THE SAME |
摘要 |
The present invention relates to a manufacturing method of a composite substrate. The method includes the steps of: providing a substrate; providing a precursor of group III elements and a precursor of nitrogen (N) element alternately in an atomic layer deposition (ALD) process or a plasma-enhanced atomic layer deposition (PEALD) process so as to deposit a nitride buffer layer on the substrate; and annealing the nitride buffer layer on the substrate at a temperature in the range of 300° C. to 1600° C.
|
申请公布号 |
US2013181240(A1) |
申请公布日期 |
2013.07.18 |
申请号 |
US201313744474 |
申请日期 |
2013.01.18 |
申请人 |
CRYSTALWISE TECHNOLOGY INC.;MING-JANG CHEN;CRYSTALWISE TECHNOLOGY INC. |
发明人 |
CHEN MIIN-JANG;LIN MING-CHIH;HSU WEN-CHING |
分类号 |
H01L33/00;H01L33/02 |
主分类号 |
H01L33/00 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|