发明名称 ULTRASONIC JUNCTION METHOD
摘要 PROBLEM TO BE SOLVED: To provide an ultrasonic flip chip mounting method which achieves small variations in a junction state of electrodes between a semiconductor chip and a substrate.SOLUTION: According to this invention, a method for mounting a semiconductor chip on a substrate includes: a first step where a semiconductor chip S, in which multiple bump electrodes 156 are formed on one major surface, and a substrate B, in which multiple electrode patterns 176 are formed on one major surface, are prepared and the bump electrodes 156 of the semiconductor chip S are placed in contact with the electrode patterns 176 of the substrate B; a second step where the bump electrodes 156 of the semiconductor chip S are separated from the electrode patterns 176 of the substrate B; and a third step where the bump electrodes 156 of the semiconductor chip S are placed in contact with the electrode patterns 176 of the substrate B and ultrasonic vibrations are provided to join the bump electrodes 156 to the electrode patterns 176.
申请公布号 JP2013141043(A) 申请公布日期 2013.07.18
申请号 JP20130090987 申请日期 2013.04.24
申请人 TEXAS INSTR JAPAN LTD 发明人 MASUMOTO MUTSUMI;NAGAO SATOSHI
分类号 H01L21/607 主分类号 H01L21/607
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