DEVICE FOR FORMING AMORPHOUS FILM AND METHOD FOR FORMING SAME

摘要

[Problem] To provide: a large-sized formation device that is advantageous in forming a large-area amorphous film; and an amorphous film formation method performed by using said formation device. [Solution] This amorphous film formation device sprays a flame including material particles toward a base material with a spraying machine, fuses the material particles with the flame, and cools the material particles and the flame with a cooling gas from before the material particles and the flame reach the base material. Material particle spraying openings (11) and flame spraying openings (12) are provided continuously along a straight line in the front surface of the spraying machine such that the cross section of the flame including the material particles becomes long horizontally. Openings (13) from which an inert gas for regulating the flow of the flame and cooling same is sprayed are provided continuously along said straight line at positions on both sides of the material particle spraying openings (11) and the flame spraying openings (12) so as to sandwich same. Further, openings (14) from which a liquid mist for cooling the flame is sprayed are provided continuously along said straight line at positions on both sides of the inert gas spraying openings (13) so as to sandwich same.