发明名称 ELECTRIC DEVICE WITH IMPROVED ELECTRODE
摘要 PROBLEM TO BE SOLVED: To provide an electrode forming method capable of cost-effectively forming electric elements such as a capacitor, an etching accumulation device, or a diode with an improved characteristic.SOLUTION: An electric device includes an electric element comprising a first electrode 104 having a first surface 106, and a pillar 108 extending in a first direction 110 from the first surface. The pillar has a length measured in parallel to the first direction from the first surface, and has a cross section 116 orthogonal to the first direction and a side wall surface 120 extending in the first direction and covering the pillar. To provide the pillar with improved mechanical stability, the pillar is provided with any one of a recess 124 and a protrusion 122 extending along at least one portion of a length of the pillar.
申请公布号 JP2013141003(A) 申请公布日期 2013.07.18
申请号 JP20130029408 申请日期 2013.02.18
申请人 NXP BV 发明人 LIONEL GUIRAUD;FRANCOIS LE CORNEC;FREDDY ROOZEBOOM;JOHAN H KLOOTWIJK;DAVID D R CHEVRIE
分类号 H01L21/8242;H01L21/822;H01L27/04;H01L27/108;H01L29/41;H01L29/417;H01L29/423;H01L29/49 主分类号 H01L21/8242
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