| 摘要 |
PROBLEM TO BE SOLVED: To form an organic film, having micro-lenses, on a substrate, having a high level difference, so as to have a uniform thickness.SOLUTION: Areas above a photoelectric conversion part and a peripheral circuit part, which are located on a semiconductor substrate, are flatly covered by an interlayer insulator. Metal wiring is formed on the interlayer insulator on the peripheral circuit part and a photosensitive material film is formed so as to be arranged substantially parallel with the semiconductor substrate and be flat. A surface part of the photosensitive material film on the photoelectric conversion part is removed so as to leave a predetermined film thickness and the remaining photosensitive material film is patterned. Then, thermal treatment is performed on the patterned photosensitive material film to form convex lens shapes. In-layer lenses are formed on the basis of the photosensitive material pattern having the convex lens shapes. In this way, the multiple in-layer lenses formed in the photoelectric conversion part have substantially the same predetermined lens diameter despite the fact that there is a large level difference between the peripheral circuit part, where the metal wiring is formed, and the photoelectric conversion part. |
