| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for forming an optical element array, which can achieve low-voltage accurate driving while maintaining sufficient insulating property.SOLUTION: The method includes the steps of: forming a plurality of wall portions standing on a surface of a first substrate; applying a resist to cover the whole element; exposing an upper part of wall surfaces of the wall portions by absorbing and removing a part of the resist by use of an absorbing material; forming a resist layer by curing the residual part of the resist; forming first and second electrodes opposing to each other and covering the wall surfaces of the wall portions and then removing the resist layer; forming an insulating film to cover the first and second electrodes; disposing a second substrate having a third electrode formed on one surface thereof, to allow the third electrode to oppose to the first substrate; and sealing a polar liquid and a nonpolar liquid having different refractive indices from each other, in between the first substrate and the second substrate. |
