ACTIVE SPECIES IRRADIATION DEVICE, ACTIVE SPECIES IRRADIATION METHOD AND METHOD FOR FORMING OBJECT HAVING BEEN IRRADIATED WITH ACTIVE SPECIES

摘要

Provided is an active species irradiation device which enables irradiation with an active species such as active oxygen or active nitrogen at a high efficiency with the use of a plasma source that is not in contact with an object to be irradiated. The active species irradiation device (100) according to the present invention comprises: a chamber (110) into which a plasma-forming gas and an active species-forming gas flow, said chamber (110) being provided with an active species irradiation port (110c) through which the active species is irradiated; an upstream electrode (120) located upstream in the plasma-forming gas flow, said upstream electrode (120) being a part of the chamber (110); and a downstream electrode (130) located downstream of the upstream electrode (120) in the plasma-forming gas flow, said downstream electrode (130) being a part of the chamber (110). In the active species irradiation device (100), the chamber (110) is configured so that the active species-forming gas flows in between the upstream electrode (120) and the active species irradiation port (110c).