| 摘要 |
PROBLEM TO BE SOLVED: To provide a thickness measurement method, thickness measuring device and thickness measurement system, capable of accurately, quickly and easily measuring thickness distribution of a measuring target of a three-dimensional structure through reducing unevenness in intensity of light irradiated from a light source.SOLUTION: A measuring target 6 has a three-dimensional structure that transmits light. An illumination device 4 irradiates the measuring target 6 with light by a plurality of linear light sources that emit light from one direction, or a surface light source that emits light from one direction. An imaging apparatus 3 picks up an image of the measuring target 6 from a direction different from a direction of the light emitted to the measuring target 6, while the light emitted to the measuring target 6 is penetrating the measuring target 6. A thickness measuring device 10 measures thickness distribution of the measuring target 6 according to the luminance of the picked-up image of the measuring target 6. |
