| 摘要 |
<p>A flow rate detection device of the invention comprises a flow rate meter 11 for outputting an output value Vd depending on a gas flow rate and detects the gas flow rate by calculating the gas flow rate on the basis of the output value output from the flow rate meter. In this invention, it is judged if the output value output from the flow rate meter should be corrected on the basis of the flow rate of the gas passing through the flow rate meter and its change rate. When it is judged that the output value output from the flow rate meter should be corrected, the output value output from the flow rate meter is corrected and then, the gas flow rate is calculated on the basis of this corrected output value.</p> |
