Process for producing superconducting thin-film material

摘要

A method of manufacturing a superconducting thin film material includes a vapor phase step of forming a superconducting layer (3) by a vapor phase method and a liquid phase step of forming a superconducting layer (4) by a liquid phase method so that the latter superconducting layer (4) is in contact with the former superconducting layer (3). Preferably, the method further includes the step of forming an intermediate layer (2) between the former superconducting layer (3) and a metal substrate (1). The metal substrate (1) is made of a metal, and preferably the intermediate layer (2) is made of an oxide having a crystal structure of any of rock type, perovskite type and pyrochlore type, and the former superconducting layer (3) and the latter superconducting layer (4) both have an RE123 composition. Accordingly, the critical current value can be improved.