发明名称 |
PROBE CARD AND METHOD FOR MANUFACTURING SAME |
摘要 |
<p>Provided is a probe card including a plurality of unit plates including pad areas and contact probe areas, a plurality of electrode pads formed in the pad areas, a plurality of contact probes formed in the contact probe areas, and a plurality of interconnecting layers electrically connecting the electrode pads and the contact probes. The plurality of unit plates has different sizes and are arranged and laminated so as to expose all the pad areas of each unit plate.</p> |
申请公布号 |
EP2615636(A2) |
申请公布日期 |
2013.07.17 |
申请号 |
EP20110823771 |
申请日期 |
2011.09.07 |
申请人 |
KOREA INSTITUTE OF MACHINERY & MATERIALS |
发明人 |
LEE, HAK-JOO;KIM, JUNG-YUP;PARK, JUN-HYUB |
分类号 |
H01L21/66;G01R1/073 |
主分类号 |
H01L21/66 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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