发明名称 |
Method of manufacturing a substrate sheet |
摘要 |
<p>The invention provides a method for producing a flexible barrier sheet (200) comprising a barrier layer (103) and metallic elements (104), said method comprising: a) providing a metallic layer (102) applied on a polymeric support layer (101), the metallic layer having a first surface (105) facing the polymeric support layer and a second surface (106) facing away from said polymeric support layer; b) providing metallic elements on the second surface of the metallic layer; c) providing a barrier layer covering said second surface of the metallic layer and said metallic elements, the barrier layer having a first surface facing the metallic layer and a second surface facing away from the metallic layer; d) releasing the polymeric support layer from the metallic layer; and e) removing the metallic layer from the metallic elements and the barrier layer. The flexible barrier sheet may be used in roll-to-roll fabrication of thin film semiconductor devices requiring a high quality barrier substrate sheet, such as OLEDs.</p> |
申请公布号 |
EP2614544(A1) |
申请公布日期 |
2013.07.17 |
申请号 |
EP20110761717 |
申请日期 |
2011.09.02 |
申请人 |
KONINKLIJKE PHILIPS ELECTRONICS N.V.;NEDERLANDSE ORGANISATIE VOOR TOEGEPAST- NATUURWETENSCHAPPELIJK ONDERZOEK TNO |
发明人 |
LIFKA, HERBERT;SANDERS, RENATUS, HENDRICUS, MARIA;MATHEW, DENNY |
分类号 |
H01L51/52 |
主分类号 |
H01L51/52 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|