| 摘要 |
PROBLEM TO BE SOLVED: To provide a radiation-sensitive resin composition excellent in sensitivity and resolution, and an interlayer insulating film excellent in transparency, adhesion in development, relative permittivity, or the like, with reduced unevenness. SOLUTION: A radiation-sensitive resin composition contains a copolymer [A], a polymerizable unsaturated compound [B], radiation-sensitive polymerization initiator [C], and an organic solvent [D]. The copolymer [A] contains a structural unit (A1), a structural unit (A2), a structural unit (A3), and a structural unit (A4). In the copolymer [A], the structural unit (A1) has a content ratio of 1 mol% to 40 mol%, the structural unit (A2) has a content ratio of 1 mol% to 15 mol%, the structural unit (A3) has a content ratio of 1 mol% to 70 mol%, and the structural unit (A4) has a content ratio of 1 mol% to 30 mol%. COPYRIGHT: (C)2012,JPO&INPIT |
