发明名称 Loading apparatus for shut tight type cassette
摘要 PURPOSE: A loading apparatus for a shut tight type cassette is provided to improve a transferring task by loading two stored cassette. CONSTITUTION: A mainframe is installed at one side of a robot fence. A door pad drive unit(130) is installed at the other side of the mainframe. A cassette door pad(140) is installed at the door pad drive unit. A stock pad drive unit(160) is installed at the cassette door storage unit. A stock pad is installed at the stock pad drive unit.
申请公布号 KR101285077(B1) 申请公布日期 2013.07.17
申请号 KR20110068835 申请日期 2011.07.12
申请人 发明人
分类号 G02F1/13;H01L21/67;H01L21/677 主分类号 G02F1/13
代理机构 代理人
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