发明名称 |
CHALCOPYRITE-TYPE SEMICONDUCTOR PHOTOVOLTAIC DEVICE |
摘要 |
A picosecond laser beam shaping assembly is disclosed for shaping a picosecond laser beam for use in patterning (e.g., scribing) semiconductor devices. The assembly comprises a pulsed fibre laser source of picosecond laser pulses, a harmonic conversion element for converting laser pulses at a first laser wavelength having a first spectral bandwidth to laser pulses at a second laser wavelength having a second spectral bandwidth, and a beam shaping apparatus for shaping the laser beam at the second laser wavelength, the beam shaping apparatus having a spectral bandwidth that substantially corresponds to the second spectral bandwidth so as to produce a laser beam having a substantially rectangular cross-sectional profile. |
申请公布号 |
EP2614525(A2) |
申请公布日期 |
2013.07.17 |
申请号 |
EP20110758430 |
申请日期 |
2011.09.06 |
申请人 |
FIANIUM LIMITED |
发明人 |
BAIRD, BRIAN W;GERKE, TIMOTHY D |
分类号 |
H01L27/142;B23K26/06;B23K26/073;B23K26/36;B23K26/40;H01L31/0749 |
主分类号 |
H01L27/142 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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