INSULATED CLAMP IS USED FOR FIXING SUSCEPTOR FOR PERFORMING THE LCD SPUTTERING PROCESS

摘要

PURPOSE: An insulated clamp for fixing a susceptor for an LCD sputtering process is provided to maintain a gap between a glass fixing clamp and glass by preventing the curve rise of the susceptor. CONSTITUTION: A top plate (10) and a bottom plate (20) are extended on a connection plate. The top plate and the bottom plate are composed of an input part, a central part, and a cross section. The input part is bent from the connection plate. The central part forms a parallel surface in parallel to the susceptor. The cross section is outwardly bent at a preset angle.