发明名称 |
Methods for fabrication of positional and compositionally controlled nanostructures on substrate |
摘要 |
Fabrication methods disclosed herein provide for a nanoscale structure or a pattern comprising a plurality of nanostructures of specific predetermined position, shape and composition, including nanostructure arrays having large area at high throughput necessary for industrial production. The resultant nanostracture patterns are useful for nanostructure arrays, specifically sensor and catalytic arrays.
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申请公布号 |
US8486287(B2) |
申请公布日期 |
2013.07.16 |
申请号 |
US20040599106 |
申请日期 |
2004.10.14 |
申请人 |
ZHU JI;GRUNES JEFF;CHOI YANG-KYU;BOKOR JEFFREY;SOMORJAI GABOR;THE REGENTS OF THE UNIVERSITY OF CALIFORNIA |
发明人 |
ZHU JI;GRUNES JEFF;CHOI YANG-KYU;BOKOR JEFFREY;SOMORJAI GABOR |
分类号 |
H01L21/285;H01L21/302;H01L27/00 |
主分类号 |
H01L21/285 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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