| 摘要 |
A substrate transfer apparatus for a flat panel display and a method thereof are provided to attach a sensor within a conveyor and to correct the twist of the substrate during the transfer by means of an align pin. An align conveyor(100) transfers a substrate(110). An align pin(130) corrects the position of the substrate during the transfer. A sensing sensor(140) senses the position twist of the transferred substrate. A control member(150) controls any one between the align pin and the conveyor according to the sensing signal outputted by the sensing sensor. The control member moves the align pin and corrects the position twist of the substrate when receiving an abnormal signal outputted by the sensing sensor. The control member stops the operation of the conveyor when receiving a stop signal outputted by the sensing sensor. The sensing sensor is located in parallel to the last shaft located at the outlet of the align conveyor. The sensing sensor is a contact type substrate sensing sensor. |
