发明名称 |
Multi-table lithographic systems, lithography processing tools and methods for processing workpieces |
摘要 |
A lithographic workpiece processing tool includes a loading area for loading a workpiece; and a processing area for processing a workpiece. The workpiece processing tool further includes a multi-table system arranged between the loading area and the processing area. The multi-table system includes at least two tables configured to pass each other while moving between the loading area and the processing area. Each of the at least two tables is configured to hold a workpiece.
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申请公布号 |
US8488105(B2) |
申请公布日期 |
2013.07.16 |
申请号 |
US20100704046 |
申请日期 |
2010.02.11 |
申请人 |
WALTHER JONAS;MICRONIC MYDATA AB |
发明人 |
WALTHER JONAS |
分类号 |
G03B27/58;G03B27/42 |
主分类号 |
G03B27/58 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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