| 摘要 |
Briefly, in accordance with one or more embodiments, an electric comb drive scanner comprises a scanning body comprising a mirror supported by one or more flexures along a first axis and one or more support structures coupled to the one or more flexures. One or more drive combs are disposed on the one or more support structures, wherein the drive combs cause the mirror to rotate about the first axis in response to a drive signal applied to the drive combs. The one or more support structures are tuned to reduce non-uniformity of warping of the support structures to reduce variation in disengagement of the drive combs along a length of the drive combs.
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