发明名称 |
Nano electromechanical integrated-circuit bank and switch |
摘要 |
A bank of nano electromechanical integrated circuit filters. The bank of integrated circuit filters comprising a silicon substrate; a sacrificial layer; a device layer including at least two resonators, wherein the at least two resonators include sub-micro excitable elements and wherein the at least two resonators posses a fundamental mode frequency as well as a collective mode frequency and wherein the collective mode frequency of the at least two resonators is determined by the fundamental frequency of the sub-micron elements. At least one switch connects to the bank of integrated circuit filters.
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申请公布号 |
US8487715(B2) |
申请公布日期 |
2013.07.16 |
申请号 |
US20070311143 |
申请日期 |
2007.09.20 |
申请人 |
MOHANTY PRITIRAJ;BADZEY ROBERT L.;TRUSTEES OF BOSTON UNIVERSITY |
发明人 |
MOHANTY PRITIRAJ;BADZEY ROBERT L. |
分类号 |
H03H9/70;H03H9/24;H03H9/46;H03H9/74 |
主分类号 |
H03H9/70 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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