发明名称 Acrylate derivative, haloester derivative, polymer compound and photoresist composition
摘要 An acrylate derivative represented by the following general formula (1): (in the formula, R1 represents a hydrogen atom, a methyl group or a trifluoromethyl group; each of R2, R3, R5, R7, R8, R9 and R10 independently represents a hydrogen atom, an alkyl group, a cycloalkyl group or an alkoxy group; each of R4 and R6 independently represents a hydrogen atom, an alkyl group, a cycloalkyl group or an alkoxy group, or R4 and R6 are bonded to each other to represent an alkylene group, -O- or -S-; n represents 0, 1 or 2; and W represents an alkylene group or a cycloalkylene group); an intermediate thereof; a method for producing the same; a polymer compound which is obtainable from polymerization of a raw material containing the foregoing acrylate derivative and which is excellent in solubility in an organic solvent used for the preparation of a photoresist composition; and a photoresist composition containing the polymer compound, an organic solvent and a photo acid generator and having excellent adhesion to substrate and less pattern collapse, are provided.
申请公布号 US8486606(B2) 申请公布日期 2013.07.16
申请号 US200913001738 申请日期 2009.06.30
申请人 SATO JUNKO;NAKAYAMA OSAMU;FUKUMOTO TAKASHI;KURARAY CO., LTD. 发明人 SATO JUNKO;NAKAYAMA OSAMU;FUKUMOTO TAKASHI
分类号 G03F7/039;C07D327/04;C07D497/08;C08F20/38 主分类号 G03F7/039
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