| 摘要 |
An apparatus for providing an interface for semiconductor processing equipment is disclosed. In some embodiments, an apparatus for providing an interface for semiconductor processing equipment having an interface card includes a display logic subsystem to provide an interface to one or more devices such as video and information displays, light pens, keyboards, computer mice, and warning light networks and alarms via a data and control bus; a bridge to provide access to the data and control bus; and a local computer subsystem coupled to the bridge and the display logic subsystem, wherein the local computer subsystem provides access to one or more remote devices. |
