APPARATUS FOR RECOVERING PARTICLES WITH LIQUID FILTER

摘要

PURPOSE: A particle collecting device is provided to facilitate the replacement of a filtering unit and to cost-effectively collect particles using liquid such as water instead of an expensive net filter. CONSTITUTION: A particle collecting device comprises a liquid filtering unit (100), an inflow pipe (200), a collecting unit (300), and a pump connecting unit (510). The liquid filtering unit receives liquid (110) in order to filter particles. A part of the inflow pipe is submerged in the liquid of the liquid filtering unit, and the inflow pipe allows particles to flow in the liquid. The collecting unit collects the liquid from the liquid filtering unit. The pump connecting unit connects the liquid filtering unit and a vacuum pump (500). [Reference numerals] (500) Vacuum pump; (600) Process chamber