| 摘要 |
<p>PURPOSE: A substrate transfer device using wires is provided to improve adhesion effect with continuous processes, and to prevent the sagging of substrates. CONSTITUTION: A substrate transfer device using wires (100) comprises a roller unit (200) and a unit (300) for detecting and controlling tension. The wires comprise caterpillar. The roller unit comprises driving rollers (210, 220, 230) and a moving roller (250). The driving roller rotates the wires. The moving roller maintains the tension of the wires. The unit for detecting and controlling tension is respectively connected to the moving rollers to detect and control the tension.</p> |
