发明名称 |
METHOD OF FORMING A METAL PATTERN AND METHOD OF MANUFACTURING A DISPLAY SUBSTRATE |
摘要 |
A method of forming a metal pattern is provided. In the method, a first titanium layer, a copper layer and a second titanium layer are sequentially formed on a substrate. A photo pattern is formed on the second titanium layer. The first titanium layer, the copper layer and the second titanium layer are patterned using the photo pattern to form a first titanium pattern, a copper pattern formed on the first titanium pattern and a second titanium pattern formed on the copper pattern. Therefore, a fine metal pattern may be formed.
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申请公布号 |
US2013178010(A1) |
申请公布日期 |
2013.07.11 |
申请号 |
US201213585255 |
申请日期 |
2012.08.14 |
申请人 |
KIM BONG-KYUN;LEE WANG-WOO;CHOI SHIN IL;PARK HONG-SICK;PARK YOUNG-WOO |
发明人 |
KIM BONG-KYUN;LEE WANG-WOO;CHOI SHIN IL;PARK HONG-SICK;PARK YOUNG-WOO |
分类号 |
C23F1/14;B05D3/00;H01L33/08 |
主分类号 |
C23F1/14 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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