| 摘要 |
PURPOSE: A wire saw is provided to reduce maintenance cost for the same and to prevent a wafer from being deteriorated by the deterioration of a wire. CONSTITUTION: A wire saw includes a pair of main rollers (1), a wire (2), and a pair of idle rollers (11,14). The main rollers are installed to be transversely long as much as possible so that an ingot having a maximum length is capable of being cut. The wire is wound on the main rollers, and rotates according to the rotations of the main rollers. The wire is in contact with the idle rollers capable of adjusting the winding amount of the wire. The idle rollers are adjacent to one of the main rollers. |
