| 摘要 |
The present invention relates to a scanning microscope, which can acquire an undistorted image of a desired area of a sample using a simple configuration. When a sample is observed, a galvano-scanner rotates a scanning mirror based on a supplied driving signal, so as to scan the sample with illumination light. A sampling circuit samples an electric signal acquired by performing photoelectric conversion on observation light from the sample, in synchronization with a sampling clock. If the scanning mirror is driven so that the rotation angle thereof non-linearly changes with respect to time, the sampling circuit appropriately suppresses sampling based on the sampling clock, so that sampling is executed only when the scanning mirror is at a predetermined position. The present invention can be applied to a scanning microscope.
|
