发明名称
摘要 <p>Surface sensing device comprising an optical monitoring system for measuring a displacement of a hollow stylus tip with respect to a stylus carrier. The optical monitoring system comprises an optically encoding component (100) positioned in the stylus carrier in the optical return path and designed to transform the information of an impinging position (50,50') of the returned beam upon the optical encoding component (100) into a change of the characteristics distribution of the returned beam, and the detector means is sensitive for the at least two distinguishable light characteristics and built for generating the electrical output signal dependent on the changed characteristics distribution of the returned beam.</p>
申请公布号 JP2013528794(A) 申请公布日期 2013.07.11
申请号 JP20130508436 申请日期 2011.04.27
申请人 发明人
分类号 G01B21/30;G01B11/00;G01B21/00 主分类号 G01B21/30
代理机构 代理人
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