发明名称 ETCHING APPARATUS
摘要 PURPOSE: An etching device is provided to protect workers from harmful influence due to etchants by performing an etching process in a sealed space. CONSTITUTION: An etchant storage unit (110) receives etchants. An etchant distribution unit (200) distributes the etchants. The etchant distribution unit includes an etchant distribution member (210) and an etchant distribution plate (220) which is located on the lower side of the etchant distribution member. An etchant injection rod (120) is located between the etchant storage unit and the etchant distribution unit. The etchant injection rod includes a first end (121) connected to the etchant storage unit and a second end (122) connected to the etchant distribution unit.
申请公布号 KR20130079740(A) 申请公布日期 2013.07.11
申请号 KR20120000408 申请日期 2012.01.03
申请人 LG SILTRON INCORPORATED 发明人 OH, HYUN;YONG, MUN SUK;PARK, CHI HO
分类号 H01L21/306 主分类号 H01L21/306
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