| 摘要 |
PROBLEM TO BE SOLVED: To provide an annealing device which maintains the sealability without adhering and fastening a sealant for sealing to an upper plate part and a lower plate part.SOLUTION: An annealing device 1 includes: a lower plate part 10 where an incident port is formed so that a laser beam passes therethrough; a sealing part installed at the lower plate part fixing thereto and expanded by air pressure; and an upper plate part 30 placed on the lower plate part and adhering to the sealing part. In the annealing device, the sealing part is expanded or contracted with the air pressure. The expansion or contraction of the sealing part prevents the sealing part and the upper plate part from fastening to each other and smoothly separates the lower plate part from the upper plate part. |
