In a fluid control device, a check valve includes a first valve housing and a first diaphragm. The first diaphragm defines a first valve chamber and a second valve chamber. An exhaust valve includes a second valve housing and a second diaphragm. The second diaphragm defines a third valve chamber and a fourth valve chamber. The check valve is opened and closed by a difference in pressure between the first valve chamber and the second valve chamber. The exhaust valve is opened and closed by a difference in pressure between the third valve chamber and the fourth valve chamber.
