发明名称 |
CHARGED PARTICLE BEAM IRRADIATION APPARATUS |
摘要 |
<p>The purpose of the present invention is to provide a charged particle beam irradiation apparatus of a relatively simple structure which performs cooling on a sample or a sample stage. An aspect of the present invention comprises: a charged particle source; a sample stage; and a driving mechanism that comprises a transmission mechanism which transmits a driving force to move the sample stage. The charged particle beam irradiation apparatus comprises a container capable of accommodating an ionic liquid (12), wherein the container is disposed in a vacuum chamber. When the ionic liquid (12) is accommodated in the container, at least a portion of the transmission mechanism is provided at a position submerged in the ionic liquid (12).</p> |
申请公布号 |
WO2013103107(A1) |
申请公布日期 |
2013.07.11 |
申请号 |
WO2012JP83439 |
申请日期 |
2012.12.25 |
申请人 |
HITACHI HIGH-TECHNOLOGIES CORPORATION |
发明人 |
KANEKO ASAKO;TAKASU HISAYUKI;MUTOU HIROBUMI |
分类号 |
H01J37/305;H01J37/20 |
主分类号 |
H01J37/305 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|