| 摘要 |
PROBLEM TO BE SOLVED: To provide an organic electroluminescent display device manufacturing method which can prevent a change in electrical characteristics of an oxide semiconductor.SOLUTION: An organic electroluminescent display device manufacturing method comprises: forming a gate electrode on a substrate; forming a first insulation layer on an upper part including the gate electrode; forming an active layer by an oxide semiconductor on the first insulation layer including the gate electrode; forming a second insulation layer on an upper part including the active layer; forming on the second insulation layer, a source electrode and a drain electrode which are connected to the active layer; forming a third insulation layer by an organic material on an upper part including the source electrode and the drain electrode; patterning the third insulation layer to expose and clean the source electrode or the drain electrode; forming on the third insulation layer, an anode electrode connected to the source electrode or the drain electrode and arranged so as not to overlap the active layer; forming a pixel defining film on an upper part including the anode electrode, and subsequently exposing the anode electrode of a luminescent region; forming an organic luminescent layer on the exposed anode electrode; and forming a cathode electrode on the organic luminescent layer. |
