发明名称 |
Scanning Electron Microscope |
摘要 |
Provided is a scanning electron microscope equipped with a high-speed and high-precision astigmatism measuring means to be used when both astigmatism generated by an electron-beam column and astigmatism generated from the surroundings of a measuring sample exist. This scanning electron microscope is characterized in controlling an astigmatism corrector (201) with high-speed and high-precision, to correct the astigmatism, by using both a method of obtaining the astigmatism from the qualities of two-dimensional images to be acquired upon changing the intensity of the astigmatism corrector (201), and a method of measuring the astigmatism from the change in the position displacement of an electron beam that occurs when the electron beam is tilted using a tilt deflector (202).
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申请公布号 |
US2013175447(A1) |
申请公布日期 |
2013.07.11 |
申请号 |
US201113812451 |
申请日期 |
2011.08.26 |
申请人 |
SOHDA YASUNARI;YAMANASHI HIROMASA;FUKUDA MUNEYUKI;OHASHI TAKEYOSHI;KOMURO OSAMU;HITACHI HIGH-TECHNOLOGIES CORPORATION |
发明人 |
SOHDA YASUNARI;YAMANASHI HIROMASA;FUKUDA MUNEYUKI;OHASHI TAKEYOSHI;KOMURO OSAMU |
分类号 |
H01J37/28 |
主分类号 |
H01J37/28 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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