| 摘要 |
PROBLEM TO BE SOLVED: To provide a multiaxial positioning device which can clean a processing region.SOLUTION: An invented multiaxial positioning device has a multiaxial driving mechanism which relatively displaces a table (5) which supports an object to be processed and a processing mechanism which subjects the object to be processed to a predetermined process. The multiaxial driving mechanism includes at least one of linear motion mechanisms (2) and (3) and partition walls (22) and (23) which separate the moving range of the linear motion mechanisms (2) and (3) and the moving range of the supporting table (5). |
