| 摘要 |
A target positioning device, in particular for a lithography system, comprising a carrier (300) for carrying a target, and a stage for carry¬ ing and moving the carrier a long a first direction (X). The stage com¬ prising two X-stage bases (401, 402), both arranged on top of a com¬ mon base plate (403), each X-stage base carries an X-stage carriage (404, 405), and a Y-beam (406) comprising a Y-stage (407) for carry¬ ing said carrier and moving the carrier in a second direction (Y). The Y-beam bridges the space between the X-stage carriages and is con¬ nected to the X-stage carriages via a flexible coupling (408, 409). The device further comprises two motors (Ml, M2) each for driving a cor¬ responding X-stage carriage along its corresponding X-stage base. The two motors are arranged at least substantially below the stage. Each motor of said two motors is coupled to an eccentric cam or crank (410, 411) which is connected to the corresponding X-stage carriage via a crank shaft (412, 413). |
